rus
Issue #2/2022
K. M. Moiseev, D. D. Vasilev, I. V. Mikhailova, I. A. Vorobev
Development of Plasma Processing Systems for Optics and Electronics Products
Development of Plasma Processing Systems for Optics and Electronics Products
DOI: 10.22184/1993-7296.FRos.2022.16.2.136.140
Plasma treatment is actively used in the manufacture of optical components for photonics and microelectronics products: cleaning the surface from contamination, reducing surface roughness, increasing surface energy and surface modification. The article provides information about the line of MPC plasma processing units developed by GN tech in collaboration with specialists from Moscow State Technical University named after. N. E. Bauman. Emphasis is placed on an innovative development – a setup with a high-current bipolar low-frequency pulse generator, which provides an increased concentration of low-energy ions and a significantly lower process temperature for processing advanced photonics and microelectronics products (polymer lenses, waveguides) that are sensitive to plasma.
Plasma treatment is actively used in the manufacture of optical components for photonics and microelectronics products: cleaning the surface from contamination, reducing surface roughness, increasing surface energy and surface modification. The article provides information about the line of MPC plasma processing units developed by GN tech in collaboration with specialists from Moscow State Technical University named after. N. E. Bauman. Emphasis is placed on an innovative development – a setup with a high-current bipolar low-frequency pulse generator, which provides an increased concentration of low-energy ions and a significantly lower process temperature for processing advanced photonics and microelectronics products (polymer lenses, waveguides) that are sensitive to plasma.
Теги: cleaning of optical elements low-temperature pulsed plasma plasma surface treatment technology for manufacturing optical components низкотемпературная импульсная плазма очистка оптических элементов плазменная обработка поверхности технология изготовления оптических компонентов
Development of Plasma Processing Systems for Optics and Electronics Products
K. M. Moiseev, D. D. Vasilev, I. V. Mikhailova, I. A. Vorobev
GNtech LLC, Moscow, Russia; Bauman Moscow State Technical University (BMSTU), Moscow, Russia
Plasma treatment is actively used in the manufacture of optical components for photonics and microelectronics products: cleaning the surface from contamination, reducing surface roughness, increasing surface energy and surface modification. The article provides information about the line of MPC plasma processing units developed by GN tech in collaboration with specialists from Moscow State Technical University named after. N. E. Bauman. Emphasis is placed on an innovative development – a setup with a high-current bipolar low-frequency pulse generator, which provides an increased concentration of low-energy ions and a significantly lower process temperature for processing advanced photonics and microelectronics products (polymer lenses, waveguides) that are sensitive to plasma.
Keywords: low-temperature pulsed plasma, technology for manufacturing optical components, plasma surface treatment, cleaning of optical elements
Received on: 28.02.2022 . Accepted on: 16.03.2022
K. M. Moiseev, D. D. Vasilev, I. V. Mikhailova, I. A. Vorobev
GNtech LLC, Moscow, Russia; Bauman Moscow State Technical University (BMSTU), Moscow, Russia
Plasma treatment is actively used in the manufacture of optical components for photonics and microelectronics products: cleaning the surface from contamination, reducing surface roughness, increasing surface energy and surface modification. The article provides information about the line of MPC plasma processing units developed by GN tech in collaboration with specialists from Moscow State Technical University named after. N. E. Bauman. Emphasis is placed on an innovative development – a setup with a high-current bipolar low-frequency pulse generator, which provides an increased concentration of low-energy ions and a significantly lower process temperature for processing advanced photonics and microelectronics products (polymer lenses, waveguides) that are sensitive to plasma.
Keywords: low-temperature pulsed plasma, technology for manufacturing optical components, plasma surface treatment, cleaning of optical elements
Received on: 28.02.2022 . Accepted on: 16.03.2022
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